MEMS-Based Capacitive Microforce Sensing

Abstract: The presentation will give a detailed introduction into the technology behind the FemtoTools MEMS-based microforce sensors, covering the MEMS design, the fabrication and the readout of these sensors. Furthermore an introduction into the different micromechanical testing instruments of FemtoTools is given, outlining how these MEMS sensors are important for our competitive advantage In our markets.

Bio: Dr. Simon Muntwyler holds a master in mechanical engineering and Ph.D. in micro-robotics from ETH, Zurich. In 2007, he co-founded the start-up FemtoTools AG where he was initially responsible for the development of the technology. In 2015, Simon completed his MBA at the IMD in Lausanne and is now in charge of marketing, the product development and the sales team at FemtoTools.