Micro Mirror Array Development at Fraunhofer IPMS
Event details
| Date | 04.09.2015 |
| Hour | 10:00 |
| Speaker | Dr. Michael Wagner, Fraunhofer Institute for Photonic Microsystems |
| Location | |
| Category | Conferences - Seminars |
The Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden, Germany carries out application specific research in close cooperation with industrial partners and other research institutions. The talk starts with some general background information on the Fraunhofer Gesellschaft and Fraunhofer IPMS, briefly touches some other IPMS MEMS microsystem activities before coming to the focus of micro mirror array (MMA) development at IPMS. Here, it is intended to give an MMA overview enabling detailed discussions later on. The MMA development at Fraunhofer IPMS is not limited to but has a strong background with respect to analogue micro mirror deflection and operation at wavelengths down to the DUV.
Bio: Michael Wagner received his diploma degree in electrical engineering (Dipl.-Ing.) from University of Siegen, Germany in 1992 (light absorption in amorphous semiconductors). In 1996 he received his PhD (Dr.-Ing.) in electrical engineering from University of Siegen on amorphous silicon solar cells and modules. From 1998 until 2003 he worked on CMOS image sensors as project manager, manager technology development and head of production in research and industrial environments. In 2003 Michael Wagner joined the Fraunhofer Institute for Photonic Microsystems (IPMS) Dresden, Germany as manager of product development of micro mirror based Spatial Light Modulators (SLM) and thereby entered the field of highly integrated Micro Opto Electro Mechanical Systems (MOEMS). Since mid of 2005 he is heading the SLM business unit at Fraunhofer IPMS.
Bio: Michael Wagner received his diploma degree in electrical engineering (Dipl.-Ing.) from University of Siegen, Germany in 1992 (light absorption in amorphous semiconductors). In 1996 he received his PhD (Dr.-Ing.) in electrical engineering from University of Siegen on amorphous silicon solar cells and modules. From 1998 until 2003 he worked on CMOS image sensors as project manager, manager technology development and head of production in research and industrial environments. In 2003 Michael Wagner joined the Fraunhofer Institute for Photonic Microsystems (IPMS) Dresden, Germany as manager of product development of micro mirror based Spatial Light Modulators (SLM) and thereby entered the field of highly integrated Micro Opto Electro Mechanical Systems (MOEMS). Since mid of 2005 he is heading the SLM business unit at Fraunhofer IPMS.
Practical information
- General public
- Free
Organizer
- Faculty STI
Contact
- Carole Loeffen Berthet