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SUMMARY:Ultrafast laser-based metrology for micron-scale measurements of t
 hermal transport\, coefficient of thermal expansion\, and temperature 
DTSTART:20110916T100000
DTSTAMP:20261005T165056Z
UID:9a7765c6d6a2924e4b9a5e3531af794768da5bae553a0575e57e27dc
CATEGORIES:Conferences - Seminars
DESCRIPTION:Prof. David Cahill\, University of Illinois\nPump-probe measur
 ements using ultrafast lasers are a standard metrology tool for determinin
 g film thickness  e.g.  the Rudolph MetaPULSE.  Over the past several year
 s  we have developed pump-probe techniques for measuring the  thermophysic
 al properties of materials with high spatial resolution  accuracy  and sen
 sitivity. Measurements of the thermal conductivity of thin films and spati
 ally resolved mapping of the thermal conductivity of bulk specimens is now
  routine: while in the past a measurement of a thin layer was a significan
 t research endeavor  we can now perform these measurements with a level of
  effort that is comparable to ellipsometry of optical constants.  Recently
   we have extended the capabilities of pump-probe optical metrology to inc
 lude quantitative measurements of the coefficient of thermal expansion.  T
 he spatial resolution is controlled by the laser spot size (typically a fe
 w microns) and the thermal penetration depth of the thermal waves (typical
 ly a few hundred nanometers).  Pump-probe measurements of two-photon absor
 ption within Si provides a surprisingly sensitive thermometer with a spati
 al resolution below 10 μm3.
LOCATION:MXF 1 https://plan.epfl.ch/?room==MXF%201
STATUS:CONFIRMED
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