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SUMMARY:Characteristics of SiH4/H2 VHF plasma produced by short gap discha
 rge
DTSTART:20110902T143000
DTSTAMP:20260427T200109Z
UID:f13d232789846643bd941d137ed7bc56aef54db28b86e46c8c031aab
CATEGORIES:Conferences - Seminars
DESCRIPTION:Prof. Yoshinobu KAWAI\nA SiH4/H2 VHF plasmawas producedwith th
 emulti rod electrode and the fundamental plasma parameterswere\nexamined a
 s a function of pressure and power\, where the frequency of the power sour
 ce was 60 MHz. It was\nfound that the ion saturation current takes a peak 
 at a certain power as well as pressure. These results were\ndiscussed from
  the point of view of electron trapping effect in VHF electric fields. In 
 addition\, anomalous\nreduction of the sheath potential was observed.
LOCATION:MT2\, Institut de Microtechnique\, Rue A.-L. Breguet 2\, 2000 Neu
 châtel
STATUS:CONFIRMED
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