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SUMMARY:14th MicroNanoFabrication Annual Review Meeting
DTSTART;VALUE=DATE:20130507
DTSTAMP:20260427T213119Z
UID:b1b23a074d76469449551c3cafe67a4fc5065e4413ef528317f4683f
CATEGORIES:Conferences - Seminars
DESCRIPTION:Including 12 invited speakers.\nSpeakers:\nPhilippe Renaud\nPh
 ilippe Fluckiger\nAlbert van den Berg\nAnna Fontcuberta i Morral\nRomuald 
 Houdré\nDavide Balma\nAndré Mercanzini\nMatthias Lutolf\nVictor Brasch
 \nMichael Fey\nHerbert Shea\nIvan Minev\nPatrice Minotti\nThe scope of the
  forum is Micro & Nano Fabrication Techniques used in the following fields
 :\nMicro and Nanoelectronics (Heterogenous Integration\, Soft Bioelectroni
 c\, Nanowires\, High-Q Resonators\, 3D Integration\, ...)\nBiomedical Appl
 ications (Microfluidics\, Cells-Manipulation\, Microelectrode Arrays\, Mol
 ecules Detection\, BioMicroNanoSystems\, ...)\nMEMS\, NEMS (Sensors and Ac
 tuators\, Motors\, Tweezers\, Micro and Nanomechanics\, ...)\nOptics (Opto
 fluidics\, Nanophotonics\, Optomechanics\, MOEMS\, ...)\nNanostructure Phy
 sics (III/V Devices\, Quantum Opto-Electronics\, Nanotubes\, Nanowires\, N
 anomechanics\, ...)\nMaterial Sciences (New Materials\, Photovoltaic Mater
 ials\, Energy Harvesting\, Micro Fuel Cells\, ...)\nFabrication Processes 
 (EBEAM Lithography\, Dry Etching\, Thin Films\, Photolithography\, CMP\, F
 IB\, ALD\, Self-Assembly\, ...)\nMetrology (Spectroscopic Ellipsometry\, F
 IB\, SEM\, AFM\, Electrical Measurements\, ...)\nPackaging and Assembly (G
 rinding\, TSV\, PDMS Micromolding\, ...)
LOCATION:Rolex Learning Center
STATUS:CONFIRMED
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