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SUMMARY:Breakdown between structured parallel plates
DTSTART:20110610T110000
DTSTAMP:20260428T092827Z
UID:2acc62b94e3f829e985cccb958acd385746b636facf5613bfd162811
CATEGORIES:Conferences - Seminars
DESCRIPTION:Boris Legradic\nThis talk presents an experimental investigati
 on into RF breakdown for parallel plate electrodes with holes or protrudin
 g features\, approximating the situation in real reactors\, and providing 
 a benchmark for fluid simulations using a drift-diffusion model with a fin
 ite-element solver.\n\nIn the design of PECVD reactors there are instances
  where the working gas will have to flow between parts of the RF electrode
  and grounded surfaces\, or where it is not possible to isolate RF parts f
 rom grounded parts via the use of a dielectric. The solution to this probl
 em is dark space\nshielding: small gaps in the range from one to a few mil
 limetres\, nominally too small for plasma to ignite. To properly design su
 ch gaps\, it is important to understand the mechanisms which result in bre
 akdown\, especially in geometries more complex than the much-studied paral
 lel-plate breakdown.
LOCATION:MT2\, Institut de Microtechnique\, Rue A.-L. Breguet 2\, 2000 Neu
 châtel
STATUS:CONFIRMED
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