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SUMMARY:Manufacturing of Micro-Nano dual Structures and its applications i
 n Micro Energy Harvesting system
DTSTART:20131104T104000
DTEND:20131104T110000
DTSTAMP:20260928T151358Z
UID:0b8f58917c866b3bcf11a93e21aa09b343edd8e97b615f8de6462793
CATEGORIES:Conferences - Seminars
DESCRIPTION:Prof. Alice Zhang (PKU)\nEPFL/IMT - Peking University workshop
  on MEMS and related technologies\nThis talk will introduce a top-down met
 hod to make mass production of micro/nano dual-scale structures. Well-desi
 gned microstructures are fabricated by normal micro fabrication process\, 
 while nanostructures are formed by following improved etching and growing 
 process to realize micro-nano dual structures. By combining the uniformed 
 microstructures and nanostructures on the same surface\, these MNDS struct
 ures have the unique properties\, such as anti-reflectivity\, super-hydrop
 hobicity and super-high-density. The relationship of MNDS and its properti
 es will be studied and analyzed by a novel method\, 3D SEM reconstruction 
 software\, which is developed by the author’s group\, which can read cro
 ss-scale SEM photo into digital data and form the solid model for simulati
 on automatically.\nSome examples of using these MNDS in energy harvesting 
 will be presented\, for example\, a high performance triboelectric nanogen
 erator with energy volume density at 465 V\, 13.4 uA/cm2\, and 53.4 mW/cm3
  and its applications in bio fields. A total transparent single-friction-s
 urface triboelectric generator and self-powered touch sensor will be demon
 strated.Biography:\nHaixia(Alice) Zhang\, Professor\, Institute of Microel
 ectronics\, Peking Universituy. She was served on the general chair of IEE
 E NEMS 2013 Conference\, the organizing chair of Transducers’11. As the 
 founder of the International Contest of Applications in Network of things 
 (iCAN)\, she organized this world-wide event since 2007. She was elected t
 he director of Integrated Micro/Nano System Engineering Center in 2006\, t
 he deputy secretary-general of Chinese Society of Micro-Nano Technology in
  2005\, the\nCo-chair of Chinese International NEMS Network (CINN) and ser
 ves as the chair of IEEE NTC Beijing Chapter. At 2006\, Dr. Zhang won Nati
 onal Invention Award of Science & Technology. Her research fields include 
 MEMS Design and Fabrication Technology\, SiC MEMS and Micro Energy Technol
 ogy.
LOCATION:Vittoz http://plan.epfl.ch/?lang=fr&room=bp1122
STATUS:CONFIRMED
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