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SUMMARY:Nanometer-Scale Direct-Write Using Probes 
DTSTART:20101008T101500
DTSTAMP:20260408T033926Z
UID:41cbf1d1b19f07687c40dd1a2e14d24c9f7aed3439ce49e2b112806b
CATEGORIES:Conferences - Seminars
DESCRIPTION:Michel Despont \nAt IBM Research\, we study a nanopatterning t
 echnology based on the local evaporation of polymers using a heated probe.
  We have demonstrated the potential of the technology by achieving 15-nm h
 alf-pitch patterning and 3D patterning of complex nanostructures. Moreover
  a pattern transfer technology has been developed in order to make use of 
 the lithographically defined structures for typical process steps involved
  in the manufacturing of CMOS devices.  Using this new technology\, it is 
 possible to fabricate complex three-dimensionally textured substrates\, e.
 g. for the guided and directed assembly of shape-matching objects. 
LOCATION: BM 5202
STATUS:CONFIRMED
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