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SUMMARY:Sensors based on Microelectromechanical Systems and Silicon Photon
 ics
DTSTART:20160407T110000
DTSTAMP:20260406T184711Z
UID:e6f52a16fd33745816783effe3ae196fee3190c1472df804a138d5a6
CATEGORIES:Conferences - Seminars
DESCRIPTION:Prof. Gino Putrino\nUniversity of Western Australia\, Australi
 a\nSurface micromachined devices provide a unique technique for creating v
 arious sensors\nwith application for many industries including biomedical\
 , agricultural\, and mining.\nMicroelectromechanical systems (MEMS) built 
 using large-scale foundry techniques are\nrobust and low-cost. We look at 
 three main types of MEMS sensors: 1) microcantilevers\nused as sensing tra
 nsducers\, 2) infrared microspectrometers based on a tunable Fabry-\nPerot
  cavity\, and 3) Terahertz filters based on meta-atom interaction.\n1) Mic
 rocantilevers are combined with a silicon\nphotonics readout technique to 
 provide a scalable\nsystem capable of measuring picometer-scale\nmovements
  of multiple cantilevers in an array.\nRadiation pressure can be used to a
 ctuate the\ncantilevers to create an all-optical dynamic\nsensing system.\
 n2) Tunable infrared microspectrometers based on\nthin film cavities are d
 emonstrated over a full octave optical range. These thin film\nmembranes c
 an range from sizes of hundreds of microns squared to a few millimetres\ns
 quared\, providing a pathway towards compact\, robust infrared hyperspectr
 al imaging.\n3) Using photolithograpy and metal deposition techniques\, a 
 combination of MEMS and\nmeta-atom structures are used to create a tunable
  terahertz filter. Tuning control is\nperformed using electrostatic forces
  for device actuation
LOCATION:BSP 407
STATUS:CONFIRMED
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