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VERSION:2.0
PRODID:-//Memento EPFL//
BEGIN:VEVENT
SUMMARY:MEMS/NEMS-based mechanical signal processors
DTSTART:20090603T140000
DTSTAMP:20260411T111315Z
UID:2da24230c1c97c1e46fe9d7d5229a3e2c4e810b70e9be01fe1428546
CATEGORIES:Conferences - Seminars
DESCRIPTION:Dr. Bongsang Kim\nThis work presents the stability performance
  of silicon-based MEMS resonators packaged in a wafer-scale film encapsula
 tion\, dubbed 'epi-seal'.
LOCATION:CO216
STATUS:CONFIRMED
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END:VCALENDAR