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SUMMARY:Active Vibration Isolation System for a High Precision Positioning
  Stage.
DTSTART:20120615T101500
DTSTAMP:20260408T050049Z
UID:5a0cf6952239ff18d200508fea862516319fdaead28c56b363a130df
CATEGORIES:Conferences - Seminars
DESCRIPTION:Dr. M. Kunze\, ETEL motion technology\, Switzerland.\nPosition
 ing stages used in the semiconductor inspection market are sensitive to fl
 oor vibrations. Indeed\, floor vibrations degrade the performance of the s
 tage in terms of position stability. In order to prevent this\, stages sho
 uld have a low-stiffness suspension on the floor. However\, such a suspens
 ion on the floor increases the influence of the vibrations induced by the 
 stage movements\, increasing thus the settling time. To avoid this contrad
 ictory problem different techniques are used\, one of them being the use o
 f active vibration isolation system. This presentation will introduce the 
 audience to different ways of isolating stages from floor vibrations\; and
  will present in more details one particular solution called active vibrat
 ion isolation system.
LOCATION:ME C2 405
STATUS:CONFIRMED
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