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VERSION:2.0
PRODID:-//Memento EPFL//
BEGIN:VEVENT
SUMMARY:Growth\, Integration\, and Functional Characterization of AlScN Th
 in Films for RF MEMS Devices
DTSTART:20190222T173000
DTSTAMP:20260408T085048Z
UID:685b4617779057c1f9df453cb1633a12d2d4bb95631ab6eb10795dfa
CATEGORIES:Thesis defenses
DESCRIPTION:Fazel PARSAPOUR\nThesis director : Prof. P. Muralt\nMaterials 
 Science and Engineering doctoral program.\nThesis 9188\n 
LOCATION:SG 1138 https://plan.epfl.ch/?room==SG%201138
STATUS:CONFIRMED
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END:VCALENDAR