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SUMMARY:MechE Colloquium: 30 years of thermo-mechanical nanoengineering us
 ing heated AFM tips
DTSTART:20210323T121500
DTEND:20210323T131500
DTSTAMP:20260916T065534Z
UID:a6e16a883ccdb6dc8f0305f8eb02a0b6e0fe48681154c89694348468
CATEGORIES:Conferences - Seminars
DESCRIPTION:Prof. Jürgen Brugger\, Microsystems Laboratory (LMIS1)\, EPFL
  School of Engineering (STI)\, Institute of Microengineering (IMT)\nAbstra
 ct:\nSoon after the first publication of the atomic force microscope (AFM)
  in 1985 attempts were made to extend the surface probing method beyond mi
 croscopy\, in particular towards patterning. One of the early variants for
  this purpose operated a heated nano-tip to perform thermally induced phas
 e changes of materials. The unique combination of localized heating (30 nm
  scale\, ~ 500 deg C) and\, due to the small thermal masses involved\, ext
 remely fast heating/cooling cycles (10E-6 s) has led to the development of
  probe-based data storage microsystems\, which however has been discontinu
 ed meanwhile. Nonetheless\, nano-tips were further perfected as nanotools 
 to locally induce a phase change in materials for a wide range of explorat
 ory studies. Today\, thermal scanning probe lithography (t-SPL) has mature
 d into turn-key systems for nano-lithography\, that can be compared to som
 e extend to electron beam lithography\, but without the need for charged p
 articles. The full grasp of potential applications in R&D and production i
 s still growing as the technique is still emerging.\n\nIn this talk\, I wi
 ll give first some background how heated AFM probes were initially designe
 d and fabricated that led to today’s advanced thermo-mechanical probe de
 sign of micro-cantilever and nano-tips. I will review the main achievement
 s up to date [1] and then present recent results on t-SPL on 2D materials 
 [2\, 3]\, and will conclude with some outlook on further challenges in hot
 -tip nanoengineering.\n\nReferences:\n[1] Thermal scanning probe lithograp
 hy—A review\; ST Howell et al. - Microsystems & Nanoengineering\, 2020\n
 [2] Thermomechanical Nanocutting of 2D Materials\; X Liu et al. - Advanced
  Materials\, 2020\n[3] Thermomechanical Nanostraining of Two-Dimensional M
 aterials\; X Liu et al. - Nano letters\, 2020\n\nBio:\nProf. Jürgen Brugg
 er is a Professor of Microengineering and co-affiliated to Materials Scien
 ce. Before joining EPFL\, he was at the MESA+ Research Institute of Nanote
 chnology at the University of Twente in the Netherlands\, at the IBM Zuric
 h Research Laboratory\, and at the Hitachi Central Research Laboratory\, i
 n Tokyo\, Japan. He received a Master in Physical-Electronics and a PhD de
 gree from Neuchâtel University\, Switzerland. Research in his laboratory 
 focuses on various aspects of MEMS and Nanotechnology. In their research\,
  key competences are in micro/nanofabrication\, additive micro-manufacturi
 ng\, new materials for MEMS\, increasingly for biomedical applications. To
 gether with his students and colleagues\, they published over 200 peer-ref
 ereed papers and he had the pleasure to supervise over 20 PhD students. Fo
 rmer students and postdocs have been successful in receiving awards and st
 arting their own scientific careers. He is honored for the appointment in 
 2016 as Fellow of the IEEE “For contributions to micro and nano manufact
 uring technology”. In 2017\, his lab was awarded an ERC AdvG in the fiel
 d of advanced micro-manufacturing.
LOCATION:https://epfl.zoom.us/j/82207717593
STATUS:CONFIRMED
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