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SUMMARY:MechE Colloquium: Vibrating beam MEMS accelerometers for gravity a
 nd seismic measurements
DTSTART:20211207T121500
DTEND:20211207T131500
DTSTAMP:20260407T095714Z
UID:0f1d904ed6606537af12995394a66b8062d8e7409ce87f6c4051145d
CATEGORIES:Conferences - Seminars
DESCRIPTION:Prof. Ashwin A. Seshia\, Department of Engineering\, Cambridge
  University\nAbstract:\nAdvances in microelectromechanical systems (MEMS) 
 have enabled the widespread development of sensors for a variety of consum
 er\, automotive\, and wearable healthcare electronics applications. Howeve
 r\, there is increasing interest in the development of highly accurate MEM
 S inertial sensors for a variety of emerging applications\, for e.g.\, nav
 igation systems for pedestrians and autonomous vehicles\, and seismic and 
 gravity imaging\, where the traditional attributes of MEMS (miniaturizatio
 n and system integration) are combined with scalable transduction principl
 es to enable highly accurate physical measurements. Resonant transducers a
 nd oscillatory systems have historically been employed to conduct some of 
 the most precise physical measurements\, and resonant approaches to measur
 ement of forces and displacements in MEMS devices have enabled significant
  advances in accuracy of MEMS inertial sensors in recent years. This progr
 ess has been assisted by parallel advances in wafer-level encapsulation te
 chniques\, interface circuits\, and approaches to mitigate temperature sen
 sitivity\, also applied to products in MEMS timing and frequency control. 
 This talk will describe the evolution of vibrating beam MEMS accelerometer
 s demonstrating exceptional long-term stability for applications in gravim
 etry and seismology. Device sensitivity and stability is demonstrated thro
 ugh the tracking of Earth tides and recording of ground motion correspondi
 ng to a number of seismic events. These results demonstrate the potential 
 of vibrating beam MEMS accelerometers for high-resolution and stable measu
 rements with wider implications for precision measurement employing other 
 resonant-output MEMS devices such as gyroscopes and magnetometers.\n\nBio:
 \nAshwin A. Seshia received the B.Tech. degree in engineering physics from
  IIT Bombay in 1996\, the M.S. and Ph.D. degrees in electrical engineering
  and computer sciences from the University of California\, Berkeley\, in 1
 999 and 2002\, respectively\, and the M.A. degree from the University of C
 ambridge in 2008. He joined the Faculty of the Engineering Department\, Un
 iversity of Cambridge\, in October 2002\, where he is currently a Professo
 r of Microsystems Technology and a Fellow of Queens’ College. He is a Fe
 llow of the Institute of Physics\, the Institution for Engineering and Tec
 hnology and the IEEE. He received the 2018 IEEE Sensors Technical Achievem
 ent Award (Advanced Career-Sensor Systems) “for pioneering contributions
  to resonant microsystems with application to sub-surface density contrast
  imaging and energy harvesting systems.” He currently serves on the edit
 orial boards for the IEEE Journal of Microelectromechanical Systems and th
 e IEEE Transactions on Ultrasonics\, Ferroelectrics and Frequency Control\
 , and the Executive Committee Member of the European Frequency and Time Fo
 rum.
LOCATION:https://epfl.zoom.us/j/65093257313
STATUS:CONFIRMED
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