MEMS/NEMS-based mechanical signal processors
Event details
| Date | 03.06.2009 |
| Hour | 14:00 |
| Speaker | Dr. Bongsang Kim |
| Location |
CO216
|
| Category | Conferences - Seminars |
This work presents the stability performance of silicon-based MEMS resonators packaged in a wafer-scale film encapsulation, dubbed 'epi-seal'.
Practical information
- General public
- Free