Nanometer-Scale Direct-Write Using Probes
Event details
| Date | 08.10.2010 |
| Hour | 10:15 |
| Speaker | Michel Despont |
| Location |
BM 5202
|
| Category | Conferences - Seminars |
At IBM Research, we study a nanopatterning technology based on the local evaporation of polymers using a heated probe. We have demonstrated the potential of the technology by achieving 15-nm half-pitch patterning and 3D patterning of complex nanostructures. Moreover a pattern transfer technology has been developed in order to make use of the lithographically defined structures for typical process steps involved in the manufacturing of CMOS devices. Using this new technology, it is possible to fabricate complex three-dimensionally textured substrates, e.g. for the guided and directed assembly of shape-matching objects.
Practical information
- General public
- Free