Active Vibration Isolation System for a High Precision Positioning Stage.
Event details
| Date | 15.06.2012 |
| Hour | 10:15 |
| Speaker | Dr. M. Kunze, ETEL motion technology, Switzerland. |
| Location |
ME C2 405
|
| Category | Conferences - Seminars |
Positioning stages used in the semiconductor inspection market are sensitive to floor vibrations. Indeed, floor vibrations degrade the performance of the stage in terms of position stability. In order to prevent this, stages should have a low-stiffness suspension on the floor. However, such a suspension on the floor increases the influence of the vibrations induced by the stage movements, increasing thus the settling time. To avoid this contradictory problem different techniques are used, one of them being the use of active vibration isolation system. This presentation will introduce the audience to different ways of isolating stages from floor vibrations; and will present in more details one particular solution called active vibration isolation system.
Links
Practical information
- General public
- Free
Contact
- gregory.francois@epfl.ch