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Growth, Integration, and Functional Characterization of AlScN Thin Films for RF MEMS Devices

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Event details

Date and time 22.02.2019 17:30  
Place and room
Speaker Fazel PARSAPOUR
Category Thesis defenses

Thesis director : Prof. P. Muralt
Materials Science and Engineering doctoral program.
Thesis 9188
 

Practical information

  • General public
  • Free

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EDMX

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