Growth, Integration, and Functional Characterization of AlScN Thin Films for RF MEMS Devices
Event details
| Date | 22.02.2019 |
| Hour | 17:30 |
| Speaker | Fazel PARSAPOUR |
| Location | |
| Category | Thesis defenses |
Thesis director : Prof. P. Muralt
Materials Science and Engineering doctoral program.
Thesis 9188
Practical information
- General public
- Free