Measurements of Substrate Surface Potentials during Plasma Processing
Event details
| Date | 03.03.2009 |
| Hour | 16:30 |
| Speaker | Dr. Steve Savas, Plasma Si Inc., Fremont, California, USA |
| Location |
Rue A.-L. Breguet 2, Neuchâtel, MT2
|
| Category | Conferences - Seminars |
Measurement during processing of the variation of the surface potential and worst case potential difference across any surface dielectric layer or surface conducting layer.
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Practical information
- General public
- Free