PZT thin films for MEMS devices: From in-situ sputter deposition to energy harvesting device

Event details
Date | 10.10.2014 |
Hour | 17:15 |
Speaker | Andrea MAZZALAI |
Location | |
Category | Thesis defenses |
Thesis director : Prof. P. Muralt
Materials Science and Engineering doctoral program.
Thesis 6375
Materials Science and Engineering doctoral program.
Thesis 6375
Practical information
- General public
- Free