Sensors based on Microelectromechanical Systems and Silicon Photonics
Event details
| Date | 07.04.2016 |
| Hour | 11:00 |
| Speaker |
Prof. Gino Putrino University of Western Australia, Australia |
| Location |
BSP 407
|
| Category | Conferences - Seminars |
Surface micromachined devices provide a unique technique for creating various sensors
with application for many industries including biomedical, agricultural, and mining.
Microelectromechanical systems (MEMS) built using large-scale foundry techniques are
robust and low-cost. We look at three main types of MEMS sensors: 1) microcantilevers
used as sensing transducers, 2) infrared microspectrometers based on a tunable Fabry-
Perot cavity, and 3) Terahertz filters based on meta-atom interaction.
1) Microcantilevers are combined with a silicon
photonics readout technique to provide a scalable
system capable of measuring picometer-scale
movements of multiple cantilevers in an array.
Radiation pressure can be used to actuate the
cantilevers to create an all-optical dynamic
sensing system.
2) Tunable infrared microspectrometers based on
thin film cavities are demonstrated over a full octave optical range. These thin film
membranes can range from sizes of hundreds of microns squared to a few millimetres
squared, providing a pathway towards compact, robust infrared hyperspectral imaging.
3) Using photolithograpy and metal deposition techniques, a combination of MEMS and
meta-atom structures are used to create a tunable terahertz filter. Tuning control is
performed using electrostatic forces for device actuation
with application for many industries including biomedical, agricultural, and mining.
Microelectromechanical systems (MEMS) built using large-scale foundry techniques are
robust and low-cost. We look at three main types of MEMS sensors: 1) microcantilevers
used as sensing transducers, 2) infrared microspectrometers based on a tunable Fabry-
Perot cavity, and 3) Terahertz filters based on meta-atom interaction.
1) Microcantilevers are combined with a silicon
photonics readout technique to provide a scalable
system capable of measuring picometer-scale
movements of multiple cantilevers in an array.
Radiation pressure can be used to actuate the
cantilevers to create an all-optical dynamic
sensing system.
2) Tunable infrared microspectrometers based on
thin film cavities are demonstrated over a full octave optical range. These thin film
membranes can range from sizes of hundreds of microns squared to a few millimetres
squared, providing a pathway towards compact, robust infrared hyperspectral imaging.
3) Using photolithograpy and metal deposition techniques, a combination of MEMS and
meta-atom structures are used to create a tunable terahertz filter. Tuning control is
performed using electrostatic forces for device actuation
Practical information
- Expert
- Free
Organizer
- Prof. Giovanni Dietler
Laboratoire de Physique de la Matière Vivante