Thin-film silicon : from large area electronics to MEMS and Lab on Chip applications
Event details
| Date | 27.11.2014 |
| Hour | 16:15 › 17:00 |
| Speaker |
Prof. João Pedro Conde Department of Bioengineering, Instituto Superior Tecnico, University of Lisbon |
| Location | |
| Category | Conferences - Seminars |
Abstract:
Thin-film amorphous and nanocrystalline silicon can be deposited at low temperatures on large area substrates such as polymers, glass and steel. These materials have found important applications in solar cells, thin-film transistor (TFT) backplanes for flat-panel displays, and in matrix-addressed photosensor arrays for digital X-rays. In addition, thin-film silicon devices have been used on flexible and stretchable substrates.
In this talk, I will discuss two applications of thin-film silicon:
- the first is to fabricate micro and nanoelectromechanical systems (MEMS and NEMS). Thin-film silicon brings the performance of crystalline and polycrystalline silicon MEMS to applications in which low-temperature processing or large area substrates are required, such as, for example for CMOS integration, or when flexible substrates are needed. I will discuss the electromechanical properties of the structural materials, MEMS and NEMS processing, and bridge and bulk resonator characteristics.
- the second is the integration of thin-film optical sensors in microfluidic devices for biosensing. The aim is to have a “sample-to-answer” system that integrates fluidic handling, sample preparation, target detection, transduction, and signal processing. I will discuss our current research on the detection of toxins for food safety applications, and of cancer biomarkers.
I will conclude with two points for discussion: (i) can thin-film silicon MEMS and NEMS be successfully integrated in Lab on Chip devices for increased sensitivity? (ii) what are potential innovative or disruptive applications of flexible thin silicon devices in MEMS and Lab on Chip?
Bio: João Pedro Conde received his Ph.D in Electrical Engineering from Princeton University in 1989. His thesis topic involved the study of the optoelectronic properties of amorphous silicon-silicon germanium multilayers for solar cell applications. Between 1989 and 1990 he was an IBM post-doctoral fellow at Yorktown Heights, where he developed a low temperature process for the deposition of amorphous silicon for which a patent was awarded. Since 1990 he has been at the Instituto Superior Tecnico (tecnico.ulisboa.pt), the engineering school of the University of Lisbon where he was part of the founding faculty of the Department of Bioengineering in 2011, in which he is presently a professor and vice-president. He is a co-responsible for the Thin Film MEMS and BioMEMS research group of INESC Microsystems and Nanotechnologies (www.inesc-mn.pt) and the coordinator of the Associated Laboratory IN-Institute of Nanoscience and Nanotechnology (http://www.in-nano.net/).
Thin-film amorphous and nanocrystalline silicon can be deposited at low temperatures on large area substrates such as polymers, glass and steel. These materials have found important applications in solar cells, thin-film transistor (TFT) backplanes for flat-panel displays, and in matrix-addressed photosensor arrays for digital X-rays. In addition, thin-film silicon devices have been used on flexible and stretchable substrates.
In this talk, I will discuss two applications of thin-film silicon:
- the first is to fabricate micro and nanoelectromechanical systems (MEMS and NEMS). Thin-film silicon brings the performance of crystalline and polycrystalline silicon MEMS to applications in which low-temperature processing or large area substrates are required, such as, for example for CMOS integration, or when flexible substrates are needed. I will discuss the electromechanical properties of the structural materials, MEMS and NEMS processing, and bridge and bulk resonator characteristics.
- the second is the integration of thin-film optical sensors in microfluidic devices for biosensing. The aim is to have a “sample-to-answer” system that integrates fluidic handling, sample preparation, target detection, transduction, and signal processing. I will discuss our current research on the detection of toxins for food safety applications, and of cancer biomarkers.
I will conclude with two points for discussion: (i) can thin-film silicon MEMS and NEMS be successfully integrated in Lab on Chip devices for increased sensitivity? (ii) what are potential innovative or disruptive applications of flexible thin silicon devices in MEMS and Lab on Chip?
Bio: João Pedro Conde received his Ph.D in Electrical Engineering from Princeton University in 1989. His thesis topic involved the study of the optoelectronic properties of amorphous silicon-silicon germanium multilayers for solar cell applications. Between 1989 and 1990 he was an IBM post-doctoral fellow at Yorktown Heights, where he developed a low temperature process for the deposition of amorphous silicon for which a patent was awarded. Since 1990 he has been at the Instituto Superior Tecnico (tecnico.ulisboa.pt), the engineering school of the University of Lisbon where he was part of the founding faculty of the Department of Bioengineering in 2011, in which he is presently a professor and vice-president. He is a co-responsible for the Thin Film MEMS and BioMEMS research group of INESC Microsystems and Nanotechnologies (www.inesc-mn.pt) and the coordinator of the Associated Laboratory IN-Institute of Nanoscience and Nanotechnology (http://www.in-nano.net/).
Practical information
- Informed public
- Free
- This event is internal
Organizer
- IMT - Institute of Microengineering