Breakdown between structured parallel plates
Event details
| Date | 10.06.2011 |
| Hour | 11:00 |
| Speaker | Boris Legradic |
| Location |
MT2, Institut de Microtechnique, Rue A.-L. Breguet 2, 2000 Neuchâtel
|
| Category | Conferences - Seminars |
This talk presents an experimental investigation into RF breakdown for parallel plate electrodes with holes or protruding features, approximating the situation in real reactors, and providing a benchmark for fluid simulations using a drift-diffusion model with a finite-element solver.
In the design of PECVD reactors there are instances where the working gas will have to flow between parts of the RF electrode and grounded surfaces, or where it is not possible to isolate RF parts from grounded parts via the use of a dielectric. The solution to this problem is dark space
shielding: small gaps in the range from one to a few millimetres, nominally too small for plasma to ignite. To properly design such gaps, it is important to understand the mechanisms which result in breakdown, especially in geometries more complex than the much-studied parallel-plate breakdown.
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- General public
- Free