Course: Introduction to scanning electron microscopy microanalysis techniques

Modern Scanning Electron Microscopes, when combined with focused ion beams (Dual beam FIBs), provide a larger number of multi-modal imaging and different analytical methods. The course format consists of introductory lectures, lectures on advanced techniques and practical work. This course may be validated for 1 ECTS credit in the doctoral programs of EPFL and ETH Zurich, after acceptance by the corresponding institution. In this case, students will need to attend every lecture and pass a final written examination.

Topics

• Basics of the scanning electron microscopy and focused ion beam instruments (construction principles, signals, interaction with the sample)
• Advanced imaging modes: STEM, low tension microscopy, high vacuum, ion channeling
• Advanced microstructure investigation with EBSD and transmission EBSD orientation mapping (EBSD strain and stress analyses with cross correlation technique)
• Chemical analyses with EDS, WDS and μ-XRF
• Chemical depth profile with FIB-TOF-SIMS
• Raman spectrometry for phase and strain/stress analyses