Design, Characterisation and Modelling of a High Current DC Arc Plasma Source for Silicon and Silicon Carbide Processing at Low Pressure
Event details
| Date | 12.12.2008 |
| Hour | 17:00 |
| Speaker | Lukas Derendinger |
| Location |
Auditoire CE4
|
| Category | Thesis defenses |
Practical information
- General public
- Free