Manufacturing of Micro-Nano dual Structures and its applications in Micro Energy Harvesting system
Event details
| Date | 04.11.2013 |
| Hour | 10:40 › 11:00 |
| Speaker | Prof. Alice Zhang (PKU) |
| Location | |
| Category | Conferences - Seminars |
EPFL/IMT - Peking University workshop on MEMS and related technologies
This talk will introduce a top-down method to make mass production of micro/nano dual-scale structures. Well-designed microstructures are fabricated by normal micro fabrication process, while nanostructures are formed by following improved etching and growing process to realize micro-nano dual structures. By combining the uniformed microstructures and nanostructures on the same surface, these MNDS structures have the unique properties, such as anti-reflectivity, super-hydrophobicity and super-high-density. The relationship of MNDS and its properties will be studied and analyzed by a novel method, 3D SEM reconstruction software, which is developed by the author’s group, which can read cross-scale SEM photo into digital data and form the solid model for simulation automatically.
Some examples of using these MNDS in energy harvesting will be presented, for example, a high performance triboelectric nanogenerator with energy volume density at 465 V, 13.4 uA/cm2, and 53.4 mW/cm3 and its applications in bio fields. A total transparent single-friction-surface triboelectric generator and self-powered touch sensor will be demonstrated.
Biography:
Haixia(Alice) Zhang, Professor, Institute of Microelectronics, Peking Universituy. She was served on the general chair of IEEE NEMS 2013 Conference, the organizing chair of Transducers’11. As the founder of the International Contest of Applications in Network of things (iCAN), she organized this world-wide event since 2007. She was elected the director of Integrated Micro/Nano System Engineering Center in 2006, the deputy secretary-general of Chinese Society of Micro-Nano Technology in 2005, the
Co-chair of Chinese International NEMS Network (CINN) and serves as the chair of IEEE NTC Beijing Chapter. At 2006, Dr. Zhang won National Invention Award of Science & Technology. Her research fields include MEMS Design and Fabrication Technology, SiC MEMS and Micro Energy Technology.
This talk will introduce a top-down method to make mass production of micro/nano dual-scale structures. Well-designed microstructures are fabricated by normal micro fabrication process, while nanostructures are formed by following improved etching and growing process to realize micro-nano dual structures. By combining the uniformed microstructures and nanostructures on the same surface, these MNDS structures have the unique properties, such as anti-reflectivity, super-hydrophobicity and super-high-density. The relationship of MNDS and its properties will be studied and analyzed by a novel method, 3D SEM reconstruction software, which is developed by the author’s group, which can read cross-scale SEM photo into digital data and form the solid model for simulation automatically.
Some examples of using these MNDS in energy harvesting will be presented, for example, a high performance triboelectric nanogenerator with energy volume density at 465 V, 13.4 uA/cm2, and 53.4 mW/cm3 and its applications in bio fields. A total transparent single-friction-surface triboelectric generator and self-powered touch sensor will be demonstrated.
Biography:
Haixia(Alice) Zhang, Professor, Institute of Microelectronics, Peking Universituy. She was served on the general chair of IEEE NEMS 2013 Conference, the organizing chair of Transducers’11. As the founder of the International Contest of Applications in Network of things (iCAN), she organized this world-wide event since 2007. She was elected the director of Integrated Micro/Nano System Engineering Center in 2006, the deputy secretary-general of Chinese Society of Micro-Nano Technology in 2005, the
Co-chair of Chinese International NEMS Network (CINN) and serves as the chair of IEEE NTC Beijing Chapter. At 2006, Dr. Zhang won National Invention Award of Science & Technology. Her research fields include MEMS Design and Fabrication Technology, SiC MEMS and Micro Energy Technology.
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Practical information
- Informed public
- Registration required
- This event is internal
Organizer
- EPFL/IMT