14th MicroNanoFabrication Annual Review Meeting
Event details
| Date | 07.05.2013 |
| Speaker |
Including 12 invited speakers. Speakers: Philippe Renaud Philippe Fluckiger Albert van den Berg Anna Fontcuberta i Morral Romuald Houdré Davide Balma André Mercanzini Matthias Lutolf Victor Brasch Michael Fey Herbert Shea Ivan Minev Patrice Minotti |
| Location |
Rolex Learning Center
|
| Category | Conferences - Seminars |
The scope of the forum is Micro & Nano Fabrication Techniques used in the following fields:
Micro and Nanoelectronics (Heterogenous Integration, Soft Bioelectronic, Nanowires, High-Q Resonators, 3D Integration, ...)
Biomedical Applications (Microfluidics, Cells-Manipulation, Microelectrode Arrays, Molecules Detection, BioMicroNanoSystems, ...)
MEMS, NEMS (Sensors and Actuators, Motors, Tweezers, Micro and Nanomechanics, ...)
Optics (Optofluidics, Nanophotonics, Optomechanics, MOEMS, ...)
Nanostructure Physics (III/V Devices, Quantum Opto-Electronics, Nanotubes, Nanowires, Nanomechanics, ...)
Material Sciences (New Materials, Photovoltaic Materials, Energy Harvesting, Micro Fuel Cells, ...)
Fabrication Processes (EBEAM Lithography, Dry Etching, Thin Films, Photolithography, CMP, FIB, ALD, Self-Assembly, ...)
Metrology (Spectroscopic Ellipsometry, FIB, SEM, AFM, Electrical Measurements, ...)
Packaging and Assembly (Grinding, TSV, PDMS Micromolding, ...)
Micro and Nanoelectronics (Heterogenous Integration, Soft Bioelectronic, Nanowires, High-Q Resonators, 3D Integration, ...)
Biomedical Applications (Microfluidics, Cells-Manipulation, Microelectrode Arrays, Molecules Detection, BioMicroNanoSystems, ...)
MEMS, NEMS (Sensors and Actuators, Motors, Tweezers, Micro and Nanomechanics, ...)
Optics (Optofluidics, Nanophotonics, Optomechanics, MOEMS, ...)
Nanostructure Physics (III/V Devices, Quantum Opto-Electronics, Nanotubes, Nanowires, Nanomechanics, ...)
Material Sciences (New Materials, Photovoltaic Materials, Energy Harvesting, Micro Fuel Cells, ...)
Fabrication Processes (EBEAM Lithography, Dry Etching, Thin Films, Photolithography, CMP, FIB, ALD, Self-Assembly, ...)
Metrology (Spectroscopic Ellipsometry, FIB, SEM, AFM, Electrical Measurements, ...)
Packaging and Assembly (Grinding, TSV, PDMS Micromolding, ...)
Practical information
- General public
- Free
Organizer
- Flückiger Philippe <[email protected]>
Contact
- Flückiger Philippe <[email protected]>