High-Resolution Magnetic Sector SIMS for Advanced Semiconductor and Materials Science Applications
Event details
| Date | 31.03.2026 |
| Hour | 14:00 › 15:00 |
| Speaker | Dr. Peter Gnauck | Raith Group, Dortmund, Germany |
| Location | |
| Category | Conferences - Seminars |
| Event Language | English |
The rapid increase in complexity of advanced materials and state-of-the-art semiconductor devices demands analytical techniques that combine high spatial resolution, excellent elemental sensitivity, and precise, automated navigation across multilayer structures. The IONMASTER magSIMS system addresses these needs by integrating a high-brightness liquid metal alloy ion source, a magnetic-sector mass analyzer equipped with a continuous full-spectrum detector, and a laser-interferometer stage for nanometer-accurate positioning.
Heavy primary ions such as Au⁺ and Bi⁺ enable superior sputtering efficiency and secondary ion yields, resulting in <25 nm spatial resolution SIMS imaging and high-quality depth profiling. The continuous detector architecture supports hyperspectral acquisition at every pixel without duty-cycle losses, providing comprehensive elemental information across complex structures.
In this seminar, we will present application case studies ranging from CMOS technology to functional materials and energy research, including CIGS solar cells and advanced nuclear cladding alloys. These examples demonstrate the analytical power of combining high-resolution SIMS, correlative imaging, and fully automated workflows for both industrial process control and innovative materials science.
Biography
Dr. Peter Gnauck earned his Ph.D. in physics from the University of Tübingen in 2000. He worked at Carl Zeiss Microscopy for over two decades in various roles, specializing in electron microscopy and focused ion beam (FIB) technology. He then joined KLA as a Product Marketing Manager for e-Beam overlay. Since 2024, he has been serving as Global Business Development Manager for FIB/SEM systems at Raith GmbH.
Practical information
- General public
- Free
- This event is internal
Organizer
- CIME