Thin films of metal-organic frameworks: The search for new deposition methods and applications


Event details

Date 29.09.2016 16:0017:00  
Speaker Prof. Ameloot Rob
Center for Surface Chemistry and Catalysis, KU Leuven, University of Leuven, Belgium
Category Conferences - Seminars
Metal-organic frameworks (MOFs) are an intriguing class of porous crystalline materials with record internal surface areas. There is tremendous potential for integrating MOFs into microelectronics, e.g. as active sensor coatings, low-k dielectrics and tunable conductors. A key enabling step in leveraging the properties of MOFs in microelectronics will be the development of robust thin film deposition methods. Thus far, typical procedures for the deposition of MOF thin films are incompatible with microelectronic fabrication because of corrosion and contamination issues.

We recenty demonstrated chemical vapor deposition (CVD) of MOF thin films (Nat Mater 2016, 15, 304-310). The MOF-CVD process allows conformal growth of thin films and extends MOF processing to one of the most commonly used techniques in thin film research and manufacturing. Two important challenges were tackled to realize this process: vapor phase supply of precursors and crystallization at the vapor-solid interphase. To our knowledge, this is the first vapor phase process for conformal film deposition of a crystalline and microporous network material. Potential applications of MOF-CVD coatings will be discussed.

Practical information

  • General public
  • Free


  • Prof. Wendy Queen


  • Evelyn Ludi